NU-354AX - C. Chan, S. Qin - "Plasma Ion Implantation Hydrogenation Process and Apparatus for Polysilicon CMOS Thin Film Transistors", 1995
File — Box: 12
Dates
- Creation: 1995
Creator
- From the Collection: Northeastern University (Boston, Mass.). Office of Technology Innovation and Commercialization (Organization)
Language of Materials
From the Collection:
The collection is entirely in English.
Conditions Governing Access:
None.
Extent
From the Collection: 23 cubic feet (23 containers)
Repository Details
Part of the Northeastern University Archives and Special Collections Repository